When B/M disassemble, assemble
Indirectly Quality inspection
Difficulty in analyzing the cause when a failure such as leak or short
ESC
When B/M Cross section destructive test
Indirectly Quality inspection
Difficulty in analyzing the cause when a failure such as leak or short
AlN/Al Heater
When B/M Cross section destructive test
Indirectly Quality inspection
Difficulty in analyzing the cause when a failure such as leak or short
Vaporizer, S/H, V/V
When B/M Cross section destructive test
Indirectly Quality inspection
Difficulty in analyzing the cause when a failure such as leak or short
Robot
ESC
Heater
Other parts
“3D Analysis System”
ESC Development
Each part pattern differnt
When cross section cutting, the numerical value such as size is unclear
Difficult to accurately cut the target area
Difficult to secure data information for each floor
VX3D application
3D Shooting and analysis
Accurate digitization for size, etc.
Detailed analysis of the target site is possible
Secure data information for each floor
Compatibility with CAD, Solidworks, ProE, etc.