Customer Needs
Customized
“PE-CVD 구성 예”
Chamber 상부
- RPG module
- RF matcher
- RF strip
- Injector
- T/C류
공정 Chamber
- Showerhead
- Coating
- Heater(Al/AlN)
- Gate valve
- Isolator

외부
- EFEM
- LoadLock
- Transfer Module
- RF generator
- 전장 box
- Power box
- Pump(Turbo/Dry)
- Heat exchanger
Chamber 하부
- Pumping unit
- ISO valve
- Throttle valve
- 압력 gauge류
- 구동 unit
- Gax box/MFC
“Furnace 구성 예”
Heater Unit
- Process Tube
- Boat
- Manifold
- Injector
- T/C류
Frame Unit
- Frame Body
- Top Cooling Cover



Shutter Unit
- Up/Down
- Swing
Boat Flange & Elevation
- Seal Rotation
- Motor 일체형
- Up/Down : Servo Motor