Customer Needs

고객 맞춤형

“PE-CVD 구성 예”

Chamber 상부

  • RPG module
  • RF matcher
  • RF strip
  • Injector
  • T/C류

공정 Chamber

  • Showerhead
  • Coating
  • Heater(Al/AlN)
  • Gate valve
  • Isolator

외부

  • EFEM
  • LoadLock
  • Transfer Module
  • RF generator
  • 전장 box
  • Power box
  • Pump(Turbo/Dry)
  • Heat exchanger

Chamber 하부

  • Pumping unit
  • ISO valve
  • Throttle valve
  • 압력 gauge류
  • 구동 unit
  • Gax box/MFC

“Furnace 구성 예”

Heater Unit

  • Process Tube
  • Boat
  • Manifold
  • Injector
  • T/C류

Frame Unit

  • Frame Body
  • Top Cooling Cover

Shutter Unit

  • Up/Down
  • Swing

Boat Flange & Elevation

  • Seal Rotation
  • Motor 일체형
  • Up/Down : Servo Motor