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PSM(Plasma Surface Modification) 기술 안내.

2020-08-06 11:23
PSM(Plasma Surface Modification)이란?

PSM (Plasma Surface Modification)?

박막증착 공정의 품질 향상을 위해  2011년부터 플라즈마 표면개질 기술을 개발하여

(We have been developing plasma surface modification technology since 2011 to improve the quality of thin film deposition process.)

삼성, SK Hynix  CVD HT-TEOS, MOLD, ACL, SSW,  Metal TIN공정, SYSTEM LSI  Metal TiN, ALD MOCVD 공정에 평가하여 우수한 결과들을 나타내고 있으며,

(Samsung, SK Hynix CVD HT-TEOS, MOLD, ACL, and SSW, Metal TIN process, SYSTEM LSI Metal TiN, ALD MOCVD process have been evaluated and show excellent results,)

상기 결과를 바탕으로, SamSung, Sk hynix,  APPLIED MATERIALS 코팅센터와 정규 공급업체로 체결되었습니다.

(Based on the above results, it was signed as a regular supplier with SamSung, Sk hynix and APPLIED MATERIALS coating centers.)

세부 기술안내와 궁금하신 내용은 게시판이나 이멜일 문의 주시면 답변 드리도록 하겠습니다.

(For detailed technical information and content you care about, we will answer if you can contact us by bulletin board or email)

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