PSM (Plasma Surface Modification)
Semiconductor/DISPLAY chambers and internal structures made by Al and Ni, because it’s Good electrical conductivity and excellent corrosion resistance High quality characteristics according
In-situ Monitoring System
Along with factory automation, there is an increasing need for sensor technology that can diagnose processes. Existing optical sensor technology is suitable for
R&D Equipment
Customer Needs Cost Reduction Plasma Particle reduction Uniformity Improving Low price Simple design 200mm/300mm PE-CVD, Furnace New process response 80℃ ~
R.F Accessory
RF Cable Ass’y FOR LF RG213 Cable Ass’y Universally used Relatively light Vulnerable to heat deflection temperature 50℃
3D Analysis
Needs. Non-destructive test When B/M disassemble, assemble Indirectly Quality inspection Difficulty in analyzing the cause when a failure such as