2017~2019

  • Developed“Plasma Coating Equipment
  • Development of THK monitoring system
  • Development of Low temp, CVD Chamber
  • F, O PSM development
  • iso 9001/14001

2015

  • Registered on Government R&D system
  • Heater monitoring system development
  • High purity Al Showerhead development

2013

  • Process monitoring system development
  • RF cable development
  • RF Filter development

2011

  • 3/17. Korea APLEARTH.Co.Ltd established
  • N PSM/Showerhead development
  • Registered on Venture

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