2017~2019
- Developed“Plasma Coating Equipment
- Development of THK monitoring system
- Development of Low temp, CVD Chamber
- F, O PSM development
- iso 9001/14001
2015
- Registered on Government R&D system
- Heater monitoring system development
- High purity Al Showerhead development
2013
- Process monitoring system development
- RF cable development
- RF Filter development
2011
- 3/17. Korea APLEARTH.Co.Ltd established
- N PSM/Showerhead development
- Registered on Venture
